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LOCOSOxidation.py File Reference
Namespaces
namespace
LOCOSOxidation
Functions
int
LOCOSOxidation.to_index
(float x)
None
LOCOSOxidation.write_surface
(level_set, str file_name)
Variables
int
LOCOSOxidation.USE_GPU
= "gpu"
float
LOCOSOxidation.GRID_DELTA
= 0.01
float
LOCOSOxidation.X_EXTENT
= 1.0
float
LOCOSOxidation.Y_MIN
= -1.0
float
LOCOSOxidation.Y_MAX
= 2.0
float
LOCOSOxidation.PAD_OXIDE_THICKNESS
= 0.03
float
LOCOSOxidation.MASK_THICKNESS
= 0.05
float
LOCOSOxidation.MASK_EDGE
= 0.0
float
LOCOSOxidation.ADVECTION_TIME
= 0.1
float
LOCOSOxidation.TIME_STEP
= 0.01
int
LOCOSOxidation.MASK_CONTACT_EPS
= 1.e-6
list
LOCOSOxidation.bounds
= [-
X_EXTENT
,
X_EXTENT
,
Y_MIN
,
Y_MAX
]
list
LOCOSOxidation.bcs
LOCOSOxidation.si_interface
= vls.Domain(
bounds
,
bcs
,
GRID_DELTA
)
LOCOSOxidation.ambient_interface
= vls.Domain(
si_interface
)
LOCOSOxidation.si_initial
= vls.Domain(
si_interface
)
LOCOSOxidation.ambient_initial
= vls.Domain(
ambient_interface
)
LOCOSOxidation.mask_interface
= vls.Domain(
bounds
,
bcs
,
GRID_DELTA
)
LOCOSOxidation.mask_geom
LOCOSOxidation.ox_params
= vls.OxidationPresets.wet1000CDealGrove100()
LOCOSOxidation.velocitySign
LOCOSOxidation.maskTransferCoefficient
LOCOSOxidation.maskConcentration
LOCOSOxidation.maxIterations
LOCOSOxidation.tolerance
LOCOSOxidation.def_params
= vls.OxidationPresets.oxideMechanics1000C(
TIME_STEP
)
LOCOSOxidation.coupling_params
= vls.OxidationCouplingParameters()
LOCOSOxidation.relaxation
LOCOSOxidation.mask_params
= vls.OxidationPresets.siliconNitrideMask1000C()
list
LOCOSOxidation.diff_min
= [
to_index
(-
X_EXTENT
),
to_index
(
Y_MIN
)]
list
LOCOSOxidation.diff_max
= [
to_index
(
X_EXTENT
),
to_index
(
Y_MAX
)]
list
LOCOSOxidation.mask_min
= [
to_index
(-
X_EXTENT
),
to_index
(
PAD_OXIDE_THICKNESS
) - 1]
list
LOCOSOxidation.mask_max
= [
to_index
(
MASK_EDGE
),
to_index
(
PAD_OXIDE_THICKNESS
+
MASK_THICKNESS
) + 1]
LOCOSOxidation.locos
= vls.Oxidation(
si_interface
,
ambient_interface
,
mask_interface
)
float
LOCOSOxidation.elapsed
= 0.0
float
LOCOSOxidation.time_eps
=
ADVECTION_TIME
* 1.e-8
LOCOSOxidation.dt
= min(
TIME_STEP
,
ADVECTION_TIME
-
elapsed
)
LOCOSOxidation.diffusion
= locos.getDiffusionField()
LOCOSOxidation.deformation
= locos.getDeformationField()
LOCOSOxidation.mask_bending
= locos.getMaskBendingField()
list
LOCOSOxidation.open_pt
= [0.5,
GRID_DELTA
, 0.]
list
LOCOSOxidation.masked_pt
= [-0.5,
GRID_DELTA
, 0.]
list
LOCOSOxidation.normal_up
= [0., 1., 0.]
LOCOSOxidation.open_conc
= diffusion.getConcentration(
open_pt
)
LOCOSOxidation.masked_conc
= diffusion.getConcentration(
masked_pt
)
LOCOSOxidation.open_si_speed
= abs(diffusion.getScalarVelocity(
open_pt
, 0,
normal_up
, 0))
LOCOSOxidation.masked_si_speed
= abs(diffusion.getScalarVelocity(
masked_pt
, 0,
normal_up
, 0))
tuple
LOCOSOxidation.suppression_ratio
= (
masked_si_speed
/
open_si_speed
) if
open_si_speed
> 0. else 0.
LOCOSOxidation.file
LOCOSOxidation.newline
LOCOSOxidation.writer
= csv.writer(f)
list
LOCOSOxidation.coord
= [i *
GRID_DELTA
, j *
GRID_DELTA
, 0.]
LOCOSOxidation.vel
= deformation.getVelocity(
coord
)
list
LOCOSOxidation.normal_dn
= [0., -1., 0.]
dict
LOCOSOxidation.mask_pts
dict
LOCOSOxidation.vels
LOCOSOxidation.mask_bottom_pressure
= deformation.getPressure(
mask_pts
["bottom"][0])
dict
LOCOSOxidation.v
=
vels
["bottom"]
dict
LOCOSOxidation.vc
=
vels
["contact_node"]
LOCOSOxidation.va
LOCOSOxidation.vm
LOCOSOxidation.ve
LOCOSOxidation.conservation
examples
LOCOSOxidation
LOCOSOxidation.py
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