ViennaLS
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lsOxidationMask.hpp File Reference
#include <lsInterior.hpp>
#include <lsOxidationDeformation.hpp>
#include <cmath>
#include <unordered_map>
#include <vector>

Go to the source code of this file.

Classes

struct  viennals::OxidationMaskParameters
 Nitride (Si₃N₄) mask of the LOCOS process. The grid points inside the mask join the oxide mechanics solve (OxidationDeformation) as a elastic body with stress memory (Maxwell creep when viscosity > 0): oxide and nitride share nodes and interface faces, so velocity and traction are continuous across their interface by construction. More...
class  viennals::OxidationMaskCarry< T, D >
 Carries a mechanically transparent (barrier-only) mask along with the oxide it rests on. More...

Namespaces

namespace  viennals