Unified oxidation time-step orchestrator. More...

#include <lsOxidation.hpp>

Public Member Functions
const std::unordered_map< std::size_t, T > &	getConcentrationCache () const
void	setConcentrationCache (std::unordered_map< std::size_t, T > cache)
	Oxidation ()=default
	~Oxidation ()
	Oxidation (SmartPointer< Domain< T, D > > passedSiInterface, SmartPointer< Domain< T, D > > passedAmbientInterface, SmartPointer< Domain< T, D > > passedMaskInterface=nullptr)
void	setGpuMode (GpuMode mode)
void	setGpuPreconditioner (GpuPreconditioner preconditioner)
void	setSiInterface (SmartPointer< Domain< T, D > > si)
void	setAmbientInterface (SmartPointer< Domain< T, D > > ambient)
void	setMaskInterface (SmartPointer< Domain< T, D > > mask)
void	setOxidationParameters (OxidationParameters params)
void	setDeformationParameters (OxidationDeformationParameters params)
void	setCouplingParameters (OxidationCouplingParameters params)
void	setMaskParameters (OxidationMaskParameters params)
void	setSpatialScheme (SpatialSchemeEnum scheme)
	Set the spatial integration scheme for all advections.
void	setTemporalScheme (TemporalSchemeEnum scheme)
	Set the temporal integration scheme for all advections.
void	setMaskCouplingIterations (unsigned iterations)
void	setMaskCouplingTolerance (T tolerance)
void	setSolveBounds (const IndexType &minIndex, const IndexType &maxIndex)
	Set the Cartesian index bounding box for the diffusion and deformation solves. If not set, bounds are auto-computed from the level-set narrow band.
void	setMaskBendingBounds (const IndexType &minIndex, const IndexType &maxIndex)
	Set the Cartesian index bounding box for the mask bending solve (LOCOS).
SmartPointer< OxidationDiffusion< T, D > >	getDiffusionField () const
	Return the diffusion field populated by the most recent apply() call.
SmartPointer< OxidationDeformation< T, D > >	getDeformationField () const
	Return the deformation field populated by the most recent apply() call.
SmartPointer< OxidationMaskBending< T, D > >	getMaskBendingField () const
	Return the mask bending field (null when no mask is set).
unsigned	getMaskCouplingIterations () const
T	getMaskCouplingResidual () const
T	getLastMaxVelocity () const
	Maximum interface velocity (µm/hr) from the most recent CFL-limited step.
void	apply (T advectionTime)
	Execute one oxidation time step of duration advectionTime.
T	applyCFLLimited (T requestedTime, T cflFactor)
	Execute one CFL-limited oxidation step; returns the actual time advanced.

Static Public Member Functions
template<class... Args>
static auto	New (Args &&...args)

Detailed Description

template<class T, int D>
class viennals::Oxidation< T, D >

Unified oxidation time-step orchestrator.

Couples diffusion, viscoelastic deformation, and (optionally) mask bending into a single CFL-limited step. When a mask interface is provided the solver operates in LOCOS mode; without one it performs standard planar or step oxidation.

Standard mode (no mask):

Diffusion+deformation coupled solve (OxidationModel)
Ambient interface advection (deformation velocity)
Si/SiO2 reaction interface advection (diffusion velocity)
Interior fill for warm-start persistence

LOCOS mode (mask provided):

Diffusion+deformation coupled solve (OxidationModel)
Nitride mask bending solve (OxidationMaskBending) + coupling loop
Pre-advection boolean clip (ambientInterface \ maskInterface)
Ambient interface advection (constrained: mask-coupled under nitride)
Si/SiO2 reaction interface advection (diffusion velocity)
Mask advection (mask bending velocity)
Interior fills + post-advection boolean clip

Usage (standard):

auto ox = ls::Oxidation<double, 2>::New(si, ambient);
ox->setOxidationParameters(oxParams);
ox->setDeformationParameters(defParams);
ox->apply(0.1);  // advection time in hours

Usage (LOCOS):

auto ox = ls::Oxidation<double, 2>::New(si, ambient, mask);
ox->setOxidationParameters(oxParams);
ox->setDeformationParameters(defParams);
ox->setMaskParameters(maskParams);
ox->setSolveBounds(minIdx, maxIdx);
ox->setMaskBendingBounds(maskMinIdx, maskMaxIdx);
ox->applyCFLLimited(0.35, 0.499);
ox->getDiffusionField()->getConcentration(pt);  // diagnostics

Constructor & Destructor Documentation

◆ Oxidation() [1/2]

template<class T, int D>

viennals::Oxidation< T, D >::Oxidation ( )

default

◆ ~Oxidation()

template<class T, int D>

viennals::Oxidation< T, D >::~Oxidation ( )

inline

◆ Oxidation() [2/2]

template<class T, int D>

viennals::Oxidation< T, D >::Oxidation	(	SmartPointer< Domain< T, D > >	passedSiInterface,
		SmartPointer< Domain< T, D > >	passedAmbientInterface,
		SmartPointer< Domain< T, D > >	passedMaskInterface = nullptr )

inline

Member Function Documentation

◆ apply()

template<class T, int D>

void viennals::Oxidation< T, D >::apply ( T advectionTime )

inline

Execute one oxidation time step of duration advectionTime.

◆ applyCFLLimited()

template<class T, int D>

T viennals::Oxidation< T, D >::applyCFLLimited	(	T	requestedTime,
		T	cflFactor )

inline

Execute one CFL-limited oxidation step; returns the actual time advanced.

◆ getConcentrationCache()

template<class T, int D>

const std::unordered_map< std::size_t, T > & viennals::Oxidation< T, D >::getConcentrationCache ( ) const

inline

◆ getDeformationField()

template<class T, int D>

SmartPointer< OxidationDeformation< T, D > > viennals::Oxidation< T, D >::getDeformationField ( ) const

inline

Return the deformation field populated by the most recent apply() call.

◆ getDiffusionField()

template<class T, int D>

SmartPointer< OxidationDiffusion< T, D > > viennals::Oxidation< T, D >::getDiffusionField ( ) const

inline

Return the diffusion field populated by the most recent apply() call.

◆ getLastMaxVelocity()

template<class T, int D>

T viennals::Oxidation< T, D >::getLastMaxVelocity ( ) const

inline

Maximum interface velocity (µm/hr) from the most recent CFL-limited step.

◆ getMaskBendingField()

template<class T, int D>

SmartPointer< OxidationMaskBending< T, D > > viennals::Oxidation< T, D >::getMaskBendingField ( ) const

inline

Return the mask bending field (null when no mask is set).

◆ getMaskCouplingIterations()

template<class T, int D>

unsigned viennals::Oxidation< T, D >::getMaskCouplingIterations ( ) const

inline

◆ getMaskCouplingResidual()

template<class T, int D>

T viennals::Oxidation< T, D >::getMaskCouplingResidual ( ) const

inline

◆ New()

template<class T, int D>

template<class... Args>

auto viennals::Oxidation< T, D >::New ( Args &&... args )

inlinestatic

◆ setAmbientInterface()

template<class T, int D>

void viennals::Oxidation< T, D >::setAmbientInterface ( SmartPointer< Domain< T, D > > ambient )

inline

◆ setConcentrationCache()

template<class T, int D>

void viennals::Oxidation< T, D >::setConcentrationCache ( std::unordered_map< std::size_t, T > cache )

inline

◆ setCouplingParameters()

template<class T, int D>

void viennals::Oxidation< T, D >::setCouplingParameters ( OxidationCouplingParameters params )

inline

◆ setDeformationParameters()

template<class T, int D>

void viennals::Oxidation< T, D >::setDeformationParameters ( OxidationDeformationParameters params )

inline

◆ setGpuMode()

template<class T, int D>

void viennals::Oxidation< T, D >::setGpuMode ( GpuMode mode )

inline

◆ setGpuPreconditioner()

template<class T, int D>

void viennals::Oxidation< T, D >::setGpuPreconditioner ( GpuPreconditioner preconditioner )

inline

◆ setMaskBendingBounds()

template<class T, int D>

void viennals::Oxidation< T, D >::setMaskBendingBounds	(	const IndexType &	minIndex,
		const IndexType &	maxIndex )

inline

Set the Cartesian index bounding box for the mask bending solve (LOCOS).

◆ setMaskCouplingIterations()

template<class T, int D>

void viennals::Oxidation< T, D >::setMaskCouplingIterations ( unsigned iterations )

inline

◆ setMaskCouplingTolerance()

template<class T, int D>

void viennals::Oxidation< T, D >::setMaskCouplingTolerance ( T tolerance )

inline

◆ setMaskInterface()

template<class T, int D>

void viennals::Oxidation< T, D >::setMaskInterface ( SmartPointer< Domain< T, D > > mask )

inline

◆ setMaskParameters()

template<class T, int D>

void viennals::Oxidation< T, D >::setMaskParameters ( OxidationMaskParameters params )

inline

◆ setOxidationParameters()

template<class T, int D>

void viennals::Oxidation< T, D >::setOxidationParameters ( OxidationParameters params )

inline

◆ setSiInterface()

template<class T, int D>

void viennals::Oxidation< T, D >::setSiInterface ( SmartPointer< Domain< T, D > > si )

inline

◆ setSolveBounds()

template<class T, int D>

void viennals::Oxidation< T, D >::setSolveBounds	(	const IndexType &	minIndex,
		const IndexType &	maxIndex )

inline

Set the Cartesian index bounding box for the diffusion and deformation solves. If not set, bounds are auto-computed from the level-set narrow band.

◆ setSpatialScheme()

template<class T, int D>

void viennals::Oxidation< T, D >::setSpatialScheme ( SpatialSchemeEnum scheme )

inline

Set the spatial integration scheme for all advections.

◆ setTemporalScheme()

template<class T, int D>

void viennals::Oxidation< T, D >::setTemporalScheme ( TemporalSchemeEnum scheme )

inline

Set the temporal integration scheme for all advections.

The documentation for this class was generated from the following file:

include/viennals/lsOxidation.hpp

Public Member Functions

Static Public Member Functions

Detailed Description

Constructor & Destructor Documentation

◆ Oxidation() [1/2]

◆ ~Oxidation()

◆ Oxidation() [2/2]

Member Function Documentation

◆ apply()

◆ applyCFLLimited()

◆ getConcentrationCache()

◆ getDeformationField()

◆ getDiffusionField()

◆ getLastMaxVelocity()

◆ getMaskBendingField()

◆ getMaskCouplingIterations()

◆ getMaskCouplingResidual()

◆ New()

◆ setAmbientInterface()

◆ setConcentrationCache()

◆ setCouplingParameters()

◆ setDeformationParameters()

◆ setGpuMode()

◆ setGpuPreconditioner()

◆ setMaskBendingBounds()

◆ setMaskCouplingIterations()

◆ setMaskCouplingTolerance()

◆ setMaskInterface()

◆ setMaskParameters()

◆ setOxidationParameters()

◆ setSiInterface()

◆ setSolveBounds()

◆ setSpatialScheme()

◆ setTemporalScheme()