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ViennaPS is a header-only C++ library for topography simulation in microelectronic fabrication processes. It models the evolution of 2D and 3D surfaces during etching, deposition, and related steps, combining advanced level-set methods for surface evolution with Monte Carlo ray tracing for flux calculation. This allows accurate, feature-scale simulation of complex fabrication geometries.
ViennaPS supports both physical process models and fast emulation approaches, enabling flexible and efficient development of semiconductor processes. It can be easily integrated into existing C++ projects and also provides Python bindings for use in Python-based workflows. The library is actively developed and continuously improved to address the needs of process and topography simulation in microelectronics.
ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know on GitHub or contact us directly at viennatools@iue.tuwien.ac.at!
This documentation is your guide to using and getting the most out of our process simulation library. Whether you’re a researcher looking to improve your simulation workflows or an engineer working to optimize fabrication processes, this library offers a flexible and powerful platform to support your work.
Inside, you’ll find clear explanations, practical examples, and recommended workflows to help you use the library effectively. Our goal is to give you the knowledge and tools needed to accurately simulate a wide range of fabrication processes, enabling better insights, informed decisions, and innovation in the field.
Contributing
If you want to contribute to ViennaPS, make sure to follow the LLVM Coding guidelines.
Make sure to format all files before creating a pull request:
cmake -B build
cmake --build build --target format
About the project
ViennaPS was developed under the aegis of the Institute for Microelectronics at the TU Wien.
Current contributors: Tobias Reiter, Noah Karnel, Roman Kostal, Lado Filipovic
Contact us via: viennatools@iue.tuwien.ac.at
License
ViennaPS is licensed under the MIT License.