Material Mapping

Each Level-Set in a Domain can be assigned a material through the Material enum.
Materials are grouped into categories, each with typical density and conductivity properties.
These properties can be used by process models to determine material-specific behavior, such as etch or deposition rates.

Material Categories

Category Description
Generic General-purpose or undefined materials
Silicon Silicon and silicon-based derivatives
OxideNitride Oxides, nitrides, and related compounds
Hardmask Carbon-based or organic hardmask layers
Metal Metals and conductive layers
Silicide Metal-silicon compounds used for contacts
Compound Compound semiconductors (III–V, etc.)
TwoD 2D or layered materials (e.g. graphene, MoS₂)
TCO Transparent conductive oxides
Misc Other materials not fitting the above groups

Material List

ID Symbol Category Density [g/cm³] Conductive
0 Mask Hardmask 500.0 No
1 Polymer Generic 1.2 No
2 Air Generic 0.0012 No
3 GAS Generic 0.001 No
4 Dielectric Generic 2.2 No
5 Metal Metal 7.5 Yes
6 Undefined Generic 0.0 No
10–21 Silicon and derivatives (Si, PolySi, aSi, SiGe, SiC, SiN, Si3N4, SiON, SiCN, SiBCN, SiCOH, SiOCN) Silicon / OxideNitride 1.9–4.0 No
30–40 Oxides and nitrides (SiO2, Al2O3, HfO2, ZrO2, TiO2, Y2O3, La2O3, AlN, Ta2O5, BN, hBN) OxideNitride 2.1–9.7 No
50–60 Hardmask / organics (C, aC, SOC, SOG, BPSG, PSG, SiLK, ARC, PMMA, PHS, HSQ) Hardmask / OxideNitride 1.0–2.2 No
70–90 Metals (W, Cu, Co, Ru, Ni, Pt, Ta, TaN, Ti, TiN, Mo, Ir, Rh, Pd, RuTa, CoW, NiW, TiAlN, Mn, MnO, MnN) Metal 4.5–22.6 Mostly Yes
100–102 Silicides (WSi2, TiSi2, MoSi2) Silicide 4.0–9.3 Yes
110–116 Compound semiconductors (Ge, GaN, GaAs, InP, InGaAs, SiGaN, SiOCH) Compound / OxideNitride 1.8–6.15 No
130–135 2D materials (Graphene, MoS2, WS2, WSe2, VO2, GST) TwoD 2.2–9.3 Mostly No
150–152 Transparent conductors (ITO, ZnO, AZO) TCO 5.5–7.1 Yes
170–175 Hardmask aliases (SiON_HM, SiN_HM, SiC_HM, TiO, ZrO, SiO2_HM) Hardmask / Misc 2.2–5.2 No

Accessing Material Information

Each material has associated metadata accessible through helper functions:

Function Description Example
to_string_view(Material) Returns the material name "SiO2"
categoryOf(Material) Returns the MaterialCategory MaterialCategory::OxideNitride
density(Material) Returns the density in g/cm³ 2.2
isConductive(Material) Returns true if conductive false

Examples

C++

 
auto material = ps::Material::Si;
auto category = ps::categoryOf(material);
auto rho = ps::density(material);
auto isCond = ps::isConductive(material);

Notes

  • The material list now includes over 170 entries covering silicon, oxides, nitrides, metals, silicides, 2D materials, and transparent conductors.
  • Each material entry includes physical and electrical properties used in process modeling and analysis.
  • The enumeration and metadata are defined in psMaterials.hpp.