Directional Etching

#include <psDirectionalEtching.hpp>

The Directional Etching Model simulates anisotropic material removal in semiconductor fabrication processes. It models etching where material removal occurs preferentially in a specified direction, influenced by both directional and isotropic velocity components.

// namespace viennaps
DirectionalEtching(const std::array<NumericType, 3> &direction,
                   NumericType directionalVelocity = 1.,
                   NumericType isotropicVelocity = 0.,
                   const Material mask = Material::Mask, 
                   bool calculateVisibility = true)

DirectionalEtching(const Vec3D<NumericType> &direction,
                   NumericType directionalVelocity,
                   NumericType isotropicVelocity = 0.,
                   const std::vector<Material> &maskMaterials =
                        std::vector<Material>{Material::Mask},
                    bool calculateVisibility = true)

DirectionalEtching(const RateSet &rateSet)

Parameter	Description	Type
`direction`	Direction vector for directional etching.	`std::array<NumericType, 3>`
`directionalVelocity`	(Optional) Velocity for directional etching.	`NumericType`
`isotropicVelocity`	(Optional) Isotropic velocity for etching. Default is set to 0.	`NumericType`
`mask`	(Optional) Material used as a mask. Default is set to `Material::Mask`.	`Material`
`calculateVisibility`	(Optional) Determines whether etching is limited by visibility constraints. Default is set to `true`.	`bool`

A specialized direction can also specified using a RateSet with the following parameters:

Parameter	Type	Description
`direction`	`Vec3D<NumericType>`	The preferred etching direction.
`directionalVelocity`	`NumericType`	The etch rate along the specified direction.
`isotropicVelocity`	`NumericType`	Velocity applied isotropically.
`maskMaterials`	`std::vector<Material>`	List of materials used as a mask.
`calculateVisibility`	`bool`	Determines whether etching is limited by visibility constraints.

Example usage:

C++

// namespace viennaps
RateSet<NumericType> rateSet;
rateSet.direction = Vec3D<NumericType>{0., 0., 1.};
rateSet.directionalVelocity = -1.;
rateSet.isotropicVelocity = 0.;
rateSet.maskMaterials = {Material::Si, Material::SiO2};
rateSet.calculateVisibility = true;

auto model = SmartPointer<DirectionalEtching<NumericType, D>>(rateSet);

Python

rateSet = vps.RateSet()
rateSet.direction = [0., 0., 1.]
rateSet.directionalVelocity = -1.
rateSet.isotropicVelocity = 0.
rateSet.maskMaterials = [vps.Material.Si, vps.Material.SiO2]
rateSet.calculateVisibility = True

model = vps.DirectionalEtching(rateSet)