Examples
Building
The examples can be built using CMake:
git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS
cmake -B build -DVIENNAPS_BUILD_EXAMPLES=ON
cmake --build build
The examples can then be executed in their respective build folders with the config files, e.g.:
cd build/examples/exampleName
./ExampleName.bat config.txt # (Windows)
./ExampleName config.txt # (Other)
Build one example with cmake --build build --target exampleName. Most examples also provide a Python script using the ViennaPS bindings.
Examples
Atomic Layer Deposition | Blazed Gratings Etching |
Bosch Process | Cantilever Wet Etching |
Emulation | DRAM Wiggling |
Faraday Cage Etching | Hole Etching |
Ion Beam Etching | Selective Epitaxy |
Sputter Deposition | Stack Etching |
TEOS Trench Deposition | Trench Deposition |
Fin Oxidation | LOCOS Oxidation |
More Examples:
- Custom Example Process
- GDS Reader
- Interpolation Demo
- Oxide Regrowth
- Step Oxidation
- Fin Oxidation
- Trench Oxidation
- LOCOS Oxidation
- Neutral Transport Cylinder
- Surface Diffusion
- SiGe Selective Etching
- Trench Deposition Geometric
- Ion Implantation and Anneal
- Manual Phosphorus Implant and Anneal
- PN Junction