Coverage Parameters


CoverageParameters are used by models that evolve one or more surface coverages (e.g., PlasmaEtching models, Fluorocarbon, and atomic-layer style models). They typically affect how the initial coverage state is computed and/or how iterative coverage updates converge.

initialized is an internal flag and is usually managed by the process/model implementation.

Field Type Default Description
tolerance double 0.0 Convergence threshold for iterative coverage initialization/updates. 0.0 typically disables tolerance-based early stopping (iteration limit only).
maxIterations unsigned (max unsigned) Maximum number of iterations for coverage initialization/updates. The default is effectively unlimited.
initialized bool false Internal bookkeeping flag indicating whether the coverage state was initialized. Usually you do not need to set this manually.