Pre-Built Models

ViennaPS provides ready-to-use process models for common etching, deposition, and process-emulation workflows.

Documented Models

• Isotropic Process
• Directional Process
• Single Particle Process
• Multi Particle Process
• SF₆/O₂ Etching
• TEOS Deposition
• TEOS PE CVD Process
• Fluorocarbon Etching
• Ion Beam Etching
• Wet Etching
• Selective Epitaxy
• Geometric Models
• Oxide Regrowth

Exposed Models With Example Coverage

The following pre-built models are exposed in the C++ and Python APIs, but currently have example-based coverage rather than dedicated reference pages:

Model	Related example
CF4O2Etching	SiGe Selective Etching
HBrO2Etching	DRAM Wiggling
FaradayCageEtching	Faraday Cage Etching
CSVFileProcess	Sputter Deposition
SingleParticleALD	Atomic Layer Deposition
SF6C4F8Etching	Bosch Process
GeometricTrenchDeposition	Trench Deposition Geometric

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Table of contents

• Isotropic Process
• Directional Process
• Single Particle Process
• Multi Particle Process
• SF₆O₂ Etching
• TEOS Deposition
• TEOS PE CVD Process
• Fluorocarbon Etching
• Ion Beam Etching
• Wet Etching
• Selective Epitaxy
• Geometric Models
• Oxide Regrowth