Atomic Layer Process Parameters

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AtomicLayerProcessParameters are specific to atomic-layer style process models (ALD/ALE-like), where the model behavior is organized into repeated cycles with one or more pulses (and optional purge steps). These parameters define the cycle count and the time discretization used for coverage evolution during pulses.

Field	Type	Default	Description
numCycles	unsigned	1	Number of ALP cycles to run.
pulseTime	double	1.0	Duration of the active pulse step within a cycle.
coverageTimeStep	double	1.0	Time step used for updating coverages within a pulse (smaller can improve accuracy but increases runtime).
purgePulseTime	double	0.0	Optional purge (or idle) duration after a pulse. Use 0.0 to disable.