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ViennaPS
Home
Dependencies
Installing the Library
GPU Acceleration
General Notes
Simulation Domain
Surface and Material Interfaces
Volume
Material Mapping
Member Functions
Creating a Geometry
Geometry Builders
Plane Geometry
Trench Geometry
Hole Geometry
Fin Geometry
Stack Geometry
Custom Geometry
GDS File Import
Process Models
Custom Models
Surface Model
Velocity Field
Particles - Flux Calculation
Primary Source Direction
Advection Callback
Pre-Built Models
Isotropic Process
Anisotropic Process
Directional Etching
Multi Particle Process
Single Particle Process
TEOSPECVD Process
SF
6
O
2
Etching
Fluorocarbon Etching
Oxide Regrowth
Running a Process
Geometry Output
Level Set
Surface Mesh
Volume Mesh
Miscellaneous
Planarize Geometry
Geometry Extrusion
Logging
Parsing Parameters
Point Data
Units
Examples
ViennaPS on Github
ViennaPS on Github
Process Models
Pre-Built Models
Anisotropic Process
Anisotropic Process
#include
<psAnisotropicProcess.hpp>
Related Examples
Cantilever Wet Etching
Selective Epitaxy
