Examples

Building

The examples can be built using CMake:

git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS

cmake -B build -DVIENNAPS_BUILD_EXAMPLES=ON
cmake --build build

The examples can then be executed in their respective build folders with the config files, e.g.:

cd examples/exampleName
./ExampleName.bat config.txt # (Windows)
./ExampleName config.txt # (Other)

Individual examples can also be build by calling make in their respective build folder. An equivalent Python script, using the ViennaPS Python bindings, is also given for most examples.

Examples

Atomic Layer Deposition
 Blazed Gratings Etching
Bosch Process
 Cantilever Wet Etching
Emulation
 DRAM Wiggling
Faraday Cage Etching
 Hole Etching
Ion Beam Etching
 Selective Epitaxy
Sputter Deposition
 Stack Etching
TEOS Trench Deposition
 Trench Deposition

More Examples: