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ViennaPS
Home
Dependencies
Installing the Library
General Notes
Simulation Domain
Surface and Material Interfaces
Volume
Material Mapping
Member Functions
Creating a Geometry
Basic Geometries
Plane Geometry
Trench Geometry
Hole Geometry
Fin Geometry
Stack Geometry
Custom Geometry
GDS File Import
Process Models
Custom Models
Surface Model
Velocity Field
Particles - Flux Calculation
Primary Source Direction
Advection Callback
Pre-Built Models
Isotropic Process
Anisotropic Process
Directional Etching
Multi Particle Process
Single Particle Process
TEOSPECVD Process
SF
6
O
2
Etching
Fluorocarbon Etching
Oxide Regrowth
Plasma Damage
Running a Process
Geometry Output
Level Set
Surface Mesh
Disk Mesh
Volume Mesh
Miscellaneous
Planarize Geometry
Geometry Extrusion
Logging
Parsing Parameters
Point Data
Examples
ViennaPS on Github
ViennaPS on Github
Process Models
Pre-Built Models
Plasma Damage
Plasma Damage
#include
<psPlasmaDamage.hpp>
Coming soon
Related Examples
Volume Model
